SKW 854 METAL 1 ELECTRICAL TEST Lot Wafers Labeled SWA1 & SWE3
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1 SKW 854 METAL 1 ELECTRICAL TEST Lot Wafers Labeled SWA1 & SWE3
2 WAFER LAYOUT 60 full die locations are tested. Wafer notch is at the right
3 TEST CHIP LAYOUT MIT 854 AZ Cu/low-K CMP characterization test mask
4 M1 Pattern Kelvin Resistors Measurement is made with a 4-terminal Kelvin resistors For structures with Lw < 5 um, a current of 0.1mA is forced; the resulting voltage is measured and resistance is calculated. For Lw < 50 um, 1mA is the forced current and for Lw = 50um, 10 ma is used.
5 Kelvin Resistor Test Structure CA_DUT1 0.2 Iso CA_DUT DA_DUT1 0.3 Iso DA_DUT BC_DUT1 0.5 Iso BC_DUT BE_DUT1 0.5 Iso BE_DUT AC_DUT1 1 Iso AC_DUT4 1 9 CC_DUT1 1 Iso CC_DUT4 1 1 CE_DUT1 1 Iso CE_DUT4 1 1 BG_DUT1 1.5 Iso BG_DUT DC_DUT1 2 Iso DC_DUT4 2 2 DE_DUT1 3 Iso DE_DUT4 3 3 DG_DUT1 5 Iso DG_DUT4 5 5 AI_DUT1 7 Iso AI_DUT4 7 7 AK_DUT1 9 Iso AK_DUT4 9 1 BI_DUT1 10 Iso BI_DUT BK_DUT1 50 Iso BK_DUT GC_DUT1 100 Iso GC_DUT M1 Lw0.18/Ls0.18/P0.36/D50/Half/SerpResist Serpentine resistance M1 Lw0.25/Ls0.25/P0.5/D50/Half/SerpResist Serpentine resistance M1 Lw0.5/Ls0.5/P1/D50/Half/SerpResist Serpentine resistance M1 Lw0.5/Ls1.5/P2/D25/Half/SerpResist Serpentine resistance M1 Lw1/Ls9/P10/D90/Half/SerpResist Serpentine resistance M1 Lw1/Ls1/P2/D50/Half/SerpResist Serpentine resistance M1 Lw1/Ls3/P4/D25/Half/SerpResist Serpentine resistance M1 Lw1.5/Ls0.5/P2/D75/Half/SerpResist Serpentine resistance M1 Lw2/Ls2/P4/D50/Half/SerpResist Serpentine resistance M1 Lw3/Ls1/P4/D75/Half/SerpResist Serpentine resistance M1 Lw5/Ls1/P6/D83/Half/SerpResist Serpentine resistance M1 Lw7/Ls3/P10/D70/Half/SerpResist Serpentine resistance M1 Lw9/Ls1/P10/D90/Half/SerpResist Serpentine resistance M1 Lw10/Ls10/P20/D50/Half/SerpResist Serpentine resistance M1 50/50/P100/D50/Half/SerpResist Serpentine resistance M1 100/100/P200/D50/DualR/Serp Resistance
6 Lw = 0.18 um Ω
7 Lw = 0.25um Ω
8 Lw = 0.5 um; Ls = 0.5 um Ω
9 Lw = 0.5 um; Ls = 1.5 um Ω
10 Lw = 1um; Ls = 9 um Ω
11 Lw = 1um; Ls = 1 um Ω
12 Lw = 1um; Ls = 3 um Ω
13 Lw = 1.5um Ω
14 Lw = 2um Ω
15 Lw = 3um Ω
16 Lw = 5um Ω
17 Lw = 7um Ω
18 Lw = 9 um Ω
19 Lw = 10um Ω
20 Lw = 50um Ω
21 Lw = 100 um Ω
22 M1 Pattern Comb Capacitance Structures Lateral comb capacitance is measured at 100 khz; leakage is measured at 0.2 MV/cm HA_DUT1_LKG M1 Pattern-Cap/0.18_0.18/EdgeLatCombLeakage HA_DUT2_LKG M1 Pattern-Cap/0.18_0.18/CenterLatCombLeakage HA_DUT3_LKG M1 Pattern-Cap/0.25_0.25/EdgeLatCombLeakage HA_DUT4_LKG M1 Pattern-Cap/0.25_0.25/CenterLatCombLeakage HA_DUT5_LKG M1 Pattern-Cap/0.25_0.25/EdgeLatCombLeakage HA_DUT6_LKG M1 Pattern-Cap/0.25_0.25/CenterLatCombLeakage HA_DUTB M1 Pattern-Cap/0.25_0.25/EdgeLatCombCap HA_DUTC M1 Pattern-Cap/0.25_0.25/CenterLatCombCap HB_DUT1_LKG M1 Pattern-Cap/0.5_0.5/EdgeLatCombLeakage HB_DUT2_LKG M1 Pattern-Cap/0.5_0.5/CenterLatCombLeakage HB_DUT3_LKG 1 1 M1 Pattern-Cap/1_1/EdgeLatCombLeakage HB_DUT4_LKG 1 1 M1 Pattern-Cap/1_1/CenterLatCombLeakage HB_DUT M1 Pattern-Cap/0.5_0.5/EdgeLatCombCap HB_DUTA M1 Pattern-Cap/0.5_0.5/CenterLatCombCap HB_DUTB 1 1 M1 Pattern-Cap/1_1/EdgeLatCombCap Capacitance HB_DUTC 1 1 M1 Pattern-Cap/1_1/CenterLatCombCap
23 Pattern Comb Capacitance Leakage: 0.25um A
24 Pattern Comb Capacitance Leakage: 0.25um A
25 Pattern Comb Capacitance Leakage: 0.25um A
26 Pattern Comb Capacitance 0.25um F
27 Pattern Comb Capacitance Leakage: 0.50 um A
28 Pattern Comb Capacitance Leakage: 1um A
29 Pattern Comb Capacitance 0.50um F
30 Pattern Comb Capacitance 1 um F
31 SKW 854 METAL 1 ELECTRICAL TEST 0.18um Sheet Rho Wafer Maps lot Split A vs. Split B
32 RHO_CA_DUT1 Split A L w = 0.18um
33 RHO_CA_DUT1 Split A L w = 0.18um
34 RHO_CA_DUT1 Split A L w = 0.18um
35 RHO_CA_DUT1 Split A L w = 0.18um
36 RHO_CA_DUT1 Split A L w = 0.18um
37 RHO_CA_DUT1 Split B L w = 0.18um
38 RHO_CA_DUT1 Split B L w = 0.18um
39 RHO_CA_DUT1 Split B L w = 0.18um
40 RHO_CA_DUT1 Split B L w = 0.18um
41 RHO_CA_DUT1 Split B L w = 0.18um
42 RHO_CA_DUT4 Split A L w = 0.18um
43 RHO_CA_ DUT4 Split A L w = 0.18um
44 RHO_CA_ DUT4 Split A L w = 0.18um
45 RHO_CA_ DUT4 Split A L w = 0.18um
46 RHO_CA_ DUT4 Split A L w = 0.18um
47 RHO_CA_ DUT4 Split B L w = 0.18um
48 RHO_CA_ DUT4 Split B L w = 0.18um
49 RHO_CA_ DUT4 Split B L w = 0.18um
50 RHO_CA_ DUT4 Split B L w = 0.18um
51 RHO_CA_ DUT4 Split B L w = 0.18um
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